One thing may be to reduce the size of your data. If you have the same names in the data multiple times then reduce to one observation per name. Depending on your data this may be more effective if set the case for all letters to upper or lower. Then you can be matching BOB SMITH to BOB SMITH instead of Bob SMITH to Bob Smith to BOB Smith to Bob SmIth (depending on quality of initial entry).
One option might be to look into additional tools. https://www.cdc.gov/cancer/npcr/tools/registryplus/lp_tech_info.htm has a link to a FREE program developed by CDC to do probabilistic matches for data similar to yours.
Providing the text files for input is fairly simple from SAS. The program also looks at other data that you may have available such as address or other common field that may help to match.
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