What SAS 9.4 maintenance release are you installing with and what OS are you installing on? I'm assuming you have tried this more than once with the same result. Did you run the Deployment Wizard as an administrator - it is one of the extra options when you right click on the executable if running on Windows?
There should be some logs in C:\Users\YOUR_USER_ID\AppData\Local\SAS\SASDeploymentWizard, check them.
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